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VACUUM WAFER CHUCK

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INDUSTRY

MATERIALS

APPLICATION

Vacuum wafer chucks are used in the semiconductor industry to accurately position the wafer in the machine.

By using ceramic materials, flatnesses of less than 1 micron can be achieved.


The wafer chuck ensures accurate positioning of the wafer in various process steps:

  • During wafer exposure
  • At inspection

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PROPERTIES

  • All patterns are possible
  • Non-flat wafers can also be processed
  • Heating can be integrated
  • Old wafer tables can be regenerated/recycled

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PRODUCTS

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PATROON 1

PATTERN 1

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PATROON 2

PATTERN 2

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PATROON 3

PATTERN 3

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ADDED VALUE

  • High stiffness of ceramics combined with a lightweight structure
  • Burl structures on the chuck reduce the contact area between chuck and wafer by a factor 100, and prevent the wafer from sticking
  • Extremely flat parts
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DIMENSIONS

Customer-specific dimensions up to 1500 mm

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SPECIFICATION

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DOWNLOADS

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SEND US YOUR PROJECT!

Ceratec Technical Ceramics B.V.
Poppenbouwing 35
4191 NZ Geldermalsen
Nederland
+31 (0)345 58 01 01
ceratec@ceratec.nl
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